AMAT 3200-01201
Product Name: Quick-Disconnect Vacuum Fitting Assembly
Product Description: A high-integrity, stainless steel vacuum fitting assembly designed for rapid, leak-tight connections in ultra-high vacuum (UHV) gas lines and chamber interfaces.
Technical Specifications:
- Material: 316L VIM/VAR stainless steel
Detailed content
- Connection Type: Face-seal, quick-disconnect (QD)
- Pressure Rating: UHV to 150 PSIG
- Seal Material: Kalrez/Perfluoroelastomer O-ring
- Size: 1/2″ tube fitting
Functional Features:
- Tool-less connection and disconnection for efficient maintenance.
- Metal-to-metal seal primary seal ensures zero virtual leaks.
- Electropolished surfaces minimize particle entrapment.
- Full flow design with minimal pressure drop.
Application Scenarios: UHV gas delivery lines, pump ports, and removable chamber components.







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