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AMAT 3020-01085
Product Introduction:
The Throttle Valve is a precision vacuum control device located between the process chamber and the vacuum pump. It regulates the chamber pressure by adjusting the aperture size of the orifice. This component is vital for controlling the mean free path of gas molecules, which directly affects plasma density, etch rate, and anisotropy.
Technical Specifications:
- Type: Pneumatic or Electric butterfly valve / Poppet valve.1.
Detailed content
- Orifice Size: Ranges from 4 inches to 12 inches or larger, depending on pumping speed requirements.
- Materials: Aluminum or Stainless Steel body with anodized surfaces for vacuum compatibility.
- Seals: Elastomer seals (Viton, Kalrez) or metal seals (CF flanges) for UHV compatibility.
- Actuation: Pneumatic actuator or high-precision stepper motor.
Functional Features:
- Precise Pressure Control: Capable of maintaining setpoints from atmospheric pressure down to milliTorr ranges with high stability.
- Fast Response: Rapid opening/closing for chamber venting or emergency isolation.
- Low Outgassing: Designed to minimize contamination in the vacuum chamber.
- Position Feedback: Integrated sensors to report valve position (open/closed percentage) to the system controller.1.
Application Scenarios:
- Process Pressure Regulation: Used in all vacuum processes (Etch, CVD, PVD, Implant) to set the operating pressure.
- Chamber Isolation: Closes to maintain vacuum when the tool is vented or serviced.
- Pump Down Control: Modulates gas flow during the initial pump-down phase to prevent arcing.
- Main Equipment: Integrated into almost all Applied Materials vacuum cluster tools and standalone chambers.
