Digital guide
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AMAT 233-2700-26
- Product Name: Stainless Steel Focus Ring Clamp
- Product Description: A precision-machined annular clamp designed to securely fasten focus rings and shield components in semiconductor process chambers.
- Technical Specifications:
- Material: 316L stainless steel, electropolished finish.
Detailed content
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- Dimensions: 260mm outer diameter, 220mm inner diameter, 5mm thickness.
- Mounting: 8 evenly spaced M4 threaded mounting holes.
- Surface Finish: Ra < 0.8 μm.
- Hardness: Rockwell B 80.
- Functional Features:
- Provides uniform clamping force to prevent component movement during processing.
- Minimizes particle generation due to smooth, non-porous surface.
- Resists corrosion from halogen plasmas and process gases.
- Easy installation and removal for chamber maintenance.
- Ensures proper alignment of focus rings for uniform plasma distribution.
- Application Scenarios: Used in 200mm and 300mm dielectric etch and PECVD chambers to secure silicon or ceramic focus rings.
