Digital guide
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Detailed content
- Voltage Rating: 5kV DC
- Frequency: 13.56 MHz
- Drive: Stepper motor controlled
- Insulation: Vacuum dielectric
Functional Features:
- Provides stable, low-loss capacitance tuning for maximum RF power transfer.
- High voltage insulation prevents arcing in plasma environments.
- Precision motor control for sub-pF tuning resolution.
- Hermetically sealed for UHV chamber compatibility.
Application Scenarios: RF match networks in PECVD, Etch, and PVD chambers operating at 13.56 MHz.
