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AMAT 1410-01366
Brand & Part Number: Applied Materials (AMAT) 1410-01366
Product Name: Heated Jacket for ISO Valve / Throttle Valve
Product Description: A temperature-controlled heating jacket designed to maintain process valves at a precise temperature, preventing condensation and process byproduct buildup.
Detailed content
Technical Specifications:
- Power Rating: 120V AC, 100W
- Temperature Range: Maintains 50°C to 150°C (factory calibrated)
- Material: Silicone rubber insulated with high-temperature fiberglass braid
- Dimensions: Custom fit for standard ISO 63/100 vacuum valves
Functional Features:
- Uniform heat distribution across the valve body to prevent cold spots
- Integrated thermal sensors for closed-loop temperature control
- Flexible, form-fitting design ensures easy installation and removal
- High chemical resistance to process vapors and cleaning agents
Application: Installed on vacuum isolation and throttle valves in gas delivery lines and exhaust systems of CVD, Etch, and ALD tools.
