Digital guide
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AMAT 1400-01056
Product Name: Input Shuttle Limit Sensor (CMP Cleaner)
Product Description: A precision industrial sensor that detects the position of the input shuttle in CMP (Chemical Mechanical Planarization) cleaner systems. It provides position feedback and safety interlocking for wafer transfer shuttles.
Technical Specifications:
- Type: Inductive or photoelectric proximity sensor.
Detailed content
- Sensing Distance: Fixed, calibrated detection distance for shuttle components.
- Output: NPN/PNP normally open or closed digital signal.
- Housing: Stainless steel, IP67-rated for wet, corrosive CMP environments.
- Connection: Quick-disconnect M12 connector.
Functional Features:
- Non-contact detection to prevent mechanical wear.
- High switching speed to capture rapid shuttle movements.
- Resistant to water, CMP slurry, and cleaning chemicals.
- Ensures accurate shuttle positioning and prevents over-travel via interlock signals.
Application Scenarios:
- Deployed on AMAT Mirra and Reflexion CMP tool wafer handling shuttles.
- Provides position feedback for post-CMP wafer cleaning and buffer modules.
