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AMAT 1063-11-044 High-Temperature Ceramic Insulator Assembly
Product Description: A high-purity ceramic insulator designed for electrical insulation in high-temperature semiconductor process chambers. It provides electrical isolation between chamber components (e.g., electrodes, heaters) while withstanding extreme temperatures and plasma erosion. The insulator is engineered for low outgassing, high dielectric strength, and compatibility with UHP vacuum environments.
Technical Specifications:
– Material: 99.8% high-purity alumina (Al₂O₃) ceramic
– Dielectric Strength: > 20 kV/mm
Detailed content
– Maximum Operating Temperature: 1800°C
– Thermal Conductivity: 35 W/m·K at 25°C
– Density: > 3.95 g/cm³
– Surface Finish: Ra < 0.6 μm (polished)
– Dimensions: 50mm (length) × 20mm (diameter) (customizable)
– Weight: 0.15 kg
– Compliance: SEMI S2, RoHS
Functional Features:
– Exceptional high-temperature stability for use in annealing and plasma chambers
– High dielectric strength for reliable electrical insulation
– Low outgassing and particle generation for UHP vacuum compatibility
– Resistance to plasma erosion and chemical attack (fluorine, chlorine)
– Precision-machined for perfect fit with AMAT chamber components
– Excellent thermal shock resistance (can withstand rapid temperature changes)
– Long service life reducing chamber maintenance frequency
Application Scenarios:
– Electrical insulation in high-temperature annealing chambers
– Insulation for plasma chamber electrodes and heaters
– UHP vacuum chamber insulation components
– PVD and CVD chamber electrical insulation
– High-temperature process tool insulation (RTP, ion implantation)
