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AMAT 1059-59425
Product Name: High-Frequency RF Cable Assembly (Low-Loss)
Product Description: A high-performance, shielded RF coaxial cable assembly designed for transmitting high-power RF signals between the RF generator and process chamber matching network.
Technical Specifications:
- Cable Type: Low-loss, flexible 50Ω coaxial (RG-214 equivalent)
Detailed content
- Frequency Range: DC to 3 GHz
- Power Rating: 3 kW continuous @ 13.56 MHz
- Connector Type: N-type (male) on both ends
- Length: 2.5 meters (customizable)
- Outer Shield: Double-braided tinned copper (100% coverage)
- Temperature Rating: -55°C to +125°C
- VSWR: < 1.2:1
Key Features:
- Ultra-low signal attenuation for maximum power transfer
- Superior EMI/RFI shielding prevents electrical noise
- High voltage insulation (10 kV RMS)
- Flexible, rugged design for fab-floor installation
- Waterproof & corrosion-resistant jacket
Application Scenarios:
Connects RF power supplies to matching networks in AMAT Etch, PECVD, and PVD chambers. Used for 13.56 MHz & 2 MHz RF power delivery systems.
