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AMAT 0900-01053
Product Name: RF Low Pass Harmonic Filter Assembly
Product Description: A passive electronic filter designed to suppress high-frequency harmonic distortions generated by RF power supplies. It ensures clean power delivery to the process chamber and protects sensitive equipment.
Technical Specifications:
- Frequency Range: Cut-off frequency 13.56 MHz (fundamental RF)
Detailed content
- Attenuation: ≥ 40 dB attenuation at 2nd harmonic (27.12 MHz) and above
- Impedance: 50 Ohms
- Power Rating: 5 kW continuous
- Connectors: N-type female RF connectors
- Construction: Air-cooled, ruggedized metal enclosure
Functional Features:
- Harmonic Suppression: Eliminates unwanted RF harmonics that cause process instability.
- Protects Equipment: Prevents damage to RF generators and match networks.
- Improves Process Stability: Ensures consistent plasma performance.
- High Power Handling: Designed for continuous high-power operation.
- Low VSWR: Minimizes signal reflection.
Application: Integrated into RF delivery systems for 13.56 MHz processes (Etch, PECVD).
