Digital guide
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AMAT 0870-01002
Product Name: 5-Phase Stepper Motor Driver (Super Vexta UDX5114N)
Product Description: A high-performance bipolar 5-phase stepper motor drive, OEM branded for Applied Materials. It provides precise control for motion systems in semiconductor fabrication tools.
Technical Specifications:
- Driver Type: Bipolar 5-phase stepper motor driver
Detailed content
- Model Equivalent: Oriental Motor Super Vexta UDX5114N
- Input Voltage: 24-48 VDC (nominal 48 VDC for industrial use)
- Output Current: Adjustable up to 3.0 A per phase
- Control Interface: Optically-isolated pulse/direction and enable signals
- Weight: 0.9 kg
Functional Features:
- Utilizes advanced micro-stepping technology for ultra-smooth motion and high resolution.
- Built-in over-current, over-voltage, and over-temperature protection.
- High torque stability and low vibration for precision positioning.
- Easy current and micro-step configuration via DIP switches.
Application Scenarios:
- Drives precision axes in robotics, wafer handlers, and slit valves.
- Deployed in AMAT Centura, Endura, and P5000 systems for precision motion control.
