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AMAT 0680-01055
- Brand & Part Number: Applied Materials (AMAT) 0680-01055
- Product Name: High-Frequency RF Match Network Module
- Product Description: A compact, high-performance RF impedance matching network module designed for precise tuning of plasma processes. It ensures maximum power transfer from RF generators to process chambers across varying load conditions.
Detailed content
- Technical Specifications:
- Frequency Range: 13.56MHz (fixed)
- Power Rating: 5kW continuous
- Input Voltage: 208V AC, 3-phase
- Impedance Range: 5–500Ω (capacitive/inductive)
- Tuning Speed: ≤ 100ms full range
- Control Interface: Analog (0–10V) + DeviceNet
- Efficiency: ≥ 90%
- Operating Temperature: 0–50°C
- Functional Features:
- Auto-tuning algorithm maintains optimal match under varying process conditions
- High-speed tuning for rapid process transitions
- Comprehensive fault detection and protection circuits
- Remote control and monitoring capabilities
- Compact air-cooled design for standard equipment racks
- Stable performance in high-electromagnetic-interference environments
- Applications:
- RF plasma matching in PECVD, etch, and PVD chambers
- AMAT Centura WxZ, P5000, and etch platforms
- Semiconductor processes requiring stable RF plasma excitation
