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AMAT 0620-01133
Product Name: Precision Linear Motion Bearing Assembly
Product Description: A high-precision, preloaded linear ball bearing assembly designed for smooth, low-friction linear motion in semiconductor wafer handling and positioning systems.
Technical Specifications:
- Type: Profile rail linear bearing (4-row ball)
Detailed content
- Rail Length: 150mm
- Travel: 100mm
- Load Rating: Dynamic 2.5kN / Static 5kN
- Accuracy: P5 (precision grade)
- Material: Bearing steel (case-hardened, 60 HRC)
- Seals: Double-lip stainless steel shields
- Lubrication: Cleanroom-grade perfluoro grease
- Operating Temperature: -10°C to +80°C
Functional Features:
- Zero backlash for ultra-precise positioning
- Low friction coefficient (< 0.002) for smooth motion
- High rigidity to resist deflection under load
- Cleanroom-compatible, low-outgassing lubrication
- Preloaded design for high stability and repeatability
Application Scenarios: Precision linear positioning for wafer transfer robots, slit valves, and load port assemblies in EFEM (Equipment Front End Modules) and AMAT wafer handling systems.
