Digital guide
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AMAT 0500-01065
Product Name: High‑Precision Vacuum Pressure Sensor Assembly
Product Description: A high‑accuracy pressure measurement device used to monitor and control vacuum levels in process chambers, load locks, and gas lines.
Technical Specifications:
- Sensing Type: Piezoresistive or capacitance manometer
Detailed content
- Measurement Range: 1 Torr to 1000 Torr
- Accuracy: ±0.25% full scale
- Output Signal: 0–10V analog or digital RS‑485
- Wetted Material: 316L electropolished stainless steel
- Operating Temperature: -10°C to +85°C
Functional Features:
- Delivers stable and accurate vacuum pressure measurement
- Resists corrosion from process gases and cleaning chemicals
- Provides fast response to dynamic pressure changes
- Supports real-time monitoring and system interlock control
- Calibrated for direct integration without additional adjustment
Application Scenarios: Used for vacuum monitoring in process chambers, load lock chambers, and gas delivery systems.
