Digital guide
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AMAT 03-00299-00
Product Name: Inductor Assembly
Product Description: A high-performance RF inductor assembly designed for use in semiconductor plasma power delivery systems. It provides precise inductance values for impedance matching in RF power circuits.
Technical Specifications:
- Inductance Value: 1.2 μH ±5%
Detailed content
- Current Rating: 25A RMS
- Frequency Range: 100kHz to 40MHz
- DC Resistance: <0.05 ohms
- Temperature Coefficient: ±50 ppm/°C
- Insulation Class: H (180°C)
- Construction: Air-core with high-temperature wire
Functional Features:
- Stable inductance over wide frequency and temperature ranges
- Low DC resistance for minimal power loss
- High current handling capability
- Excellent high-frequency performance
- Compact design for space-efficient installation
- High reliability in industrial environments
Application Scenarios:
- RF plasma generators for semiconductor processing
- Impedance matching networks
- RF power delivery systems
- Plasma etching equipment
- PVD and CVD process chambers
