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AMAT 0270-90163
Product Name: Ultra-Precision Component Centering and Alignment Fixture Assembly
Product Description: This is a professional precision tooling fixture for semiconductor equipment, used for centering, alignment and positioning assembly of core components in process chambers. It is widely used in equipment assembly, maintenance and upgrading to ensure the positional accuracy of key components.
Technical Specifications:
- Material: high-strength aluminum alloy with heat stabilization treatment, low thermal deformation
Detailed content
- Machining accuracy: positioning tolerance ±0.001mm, perpendicularity and parallelism up to 0.002mm
- Equipped with precision positioning pins, reference blocks and locking mechanism
- Surface: anti-static and cleanroom-special treatment, no contamination to components
- Adapted to vacuum chamber internal environment, low outgassing and low particle
Functional Characteristics:
- Realizes micron-level ultra-precise alignment of chamber components
- Ensures consistency and repeatability of assembly position
- Effectively reduces process abnormalities caused by component misalignment
- Quick clamping and positioning, improving maintenance and assembly efficiency
- High structural rigidity, no wear-induced accuracy loss in long-term use
Application Scenarios:
- Alignment of showerhead, electrode and liner in PVD/CVD chambers
- Calibration of wafer stage and sensor installation position
- Precision assembly of semiconductor equipment core modules
- Component positioning during equipment refurbishment and upgrade
