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AMAT 0270-70048
Product Name: 8″ Lift-to-Robot Calibration Plate Assembly
Product Description: A precision calibration plate designed for accurate alignment between wafer lift mechanisms and robot transfer systems in 8″ (200mm) semiconductor manufacturing equipment.
Technical Specifications:
- Material: Anodized aluminum alloy (6061-T6)
Detailed content
- Wafer Compatibility: 200mm wafers
- Alignment Accuracy: ±0.03 mm
- Dimensions: 250 mm × 250 mm × 12 mm
- Weight: 0.46 kg
- Surface Finish: Non-contaminating hard anodized coating
- Operating Temperature: 10°C to +40°C
- Cleanroom Compatibility: Class 100 cleanroom suitable
Functional Features:
- High-precision alignment for accurate robot positioning
- Non-contaminating materials for process purity
- Ergonomic design for easy handling
- Durable construction for repeated calibration use
- Compatibility with standard AMAT equipment
- Easy installation and adjustment
- Visual alignment guides for quick setup
Application Scenarios:
- AMAT Centura 200mm wafer systems
- AMAT Endura 200mm wafer processing equipment
- Wafer handling robot calibration stations
- Semiconductor manufacturing cleanrooms
- Wafer transfer system setup and maintenance
