Digital guide
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AMAT 0270-20212
roduct Name: Wafer Robot Calibration Tool Assembly
Product Description: A precision calibration fixture used to calibrate wafer handling robots, ensuring accurate positioning, repeatability, and alignment between robot end-effectors and process module load ports.
Technical Specifications:
- Base Material: Stainless steel with precision ground reference surfaces
Detailed content
- Reference Features: Precision-machined alignment pins and sensor targets
- Positioning Accuracy: ±0.005mm reference datum
- Sensor Compatibility: Optical and tactile robot sensors
- Wafer Compatibility: Calibrated for 200mm/300mm wafer handling systems
- Weight: Lightweight balanced design (1.2kg)
Functional Features:
- Provides precise reference points for robot teaching and calibration
- Verifies X, Y, theta, and Z-axis positioning accuracy
- Validates end-effector parallelism and repeatability
- Durable construction for daily factory use
- Compatible with standard AMAT robot maintenance procedures
Application Scenarios: Used for calibration and preventive maintenance of wafer transfer robots in Centura, Endura, and Producer 300mm semiconductor platforms.
