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AMAT 0270-20152 Robot Calibration Tool Assembly
Product Description: A precision mechanical calibration tool designed for accurate alignment and calibration of wafer handling robots in semiconductor equipment. It ensures precise robot positioning, repeatability, and wafer centering to prevent processing errors.
Technical Specifications:
- Material: 6061-T6 aluminum alloy (hard-anodized)
- Wafer Compatibility: 200mm wafers
- Positioning Accuracy: ±0.02mm
Detailed content
- Repeatability: ±0.01mm
- Dimensions: 300mm × 200mm × 50mm
- Weight: 1.8 kg
- Surface Finish: Ra < 0.8μm
- Mounting: Magnetic base for secure chamber installation
Functional Features:
- Precision-machined reference surfaces for robot alignment
- Multiple calibration points for multi-axis robot adjustment
- Non-marking contact surfaces to protect robot components
- Easy-to-read alignment guides for quick setup
- Compact design for storage in tool cabinets
- Compatible with all AMAT 200mm wafer handling robots
- Durable construction for repeated calibration use
Application Scenarios:
- Robot arm alignment in Centura/Endura transfer chambers
- Wafer centering calibration for robot end-effectors
- Periodic maintenance calibration for production robots
- New robot installation and commissioning
- Troubleshooting robot positioning errors
