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AMAT 0270-20069
Product Name: 8″ Wafer Cassette Indexer to Robot Calibration Plate Fixture
Product Description: This is a precision calibration jig used to calibrate the relative position between wafer cassette indexer and automatic handling robot. It provides a unified mechanical reference standard to eliminate positioning deviation, ensuring accurate and stable wafer grabbing and placing actions.
Technical Specifications:
- Applicable specification: 8-inch (200mm) wafer cassette system
Detailed content
- Material: high-strength anodized aluminum alloy, anti-deformation and anti-corrosion
- Reference surface flatness ≤0.002mm, positioning pin precision ±0.001mm
- Weight: about 1.26–1.29kg, portable and durable structure
- Cleanroom-compatible surface treatment, no particle pollution
- Standard installation interface, compatible with Centura mainframe robot system
Functional Characteristics:
- Provides high-precision mechanical reference for robot teaching and calibration
- Quickly corrects X/Y/Z axis and angle deviation of wafer grabbing position
- Ensures repeatability of wafer transfer and reduces wafer collision and fragments
- Simple structure, easy to install and fix, short calibration time
- Reusable, high stability in long-term frequent use
Application Scenarios:
- Robot positioning calibration during semiconductor equipment installation and commissioning
- Periodic calibration during equipment preventive maintenance
- Wafer transfer system debugging in 200mm wafer production line
- Fault location and accuracy recovery of abnormal wafer handling
