Digital guide
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Detailed content
- Pipe Size Compatibility: 1/4″ to 1/2″ OD tubing
- Accuracy: ±1% of full scale
- Output Signal: 4-20mA analog + pulse output
- Material: PFA wetted parts
- Operating Temperature: 0-60°C
- Pressure Rating: 150 PSI
Functional Features:
- Non-invasive measurement eliminates contamination risk
- No moving parts ensures maintenance-free operation
- Bi-directional flow measurement capability
- High chemical compatibility with semiconductor process fluids
- Easy clamp-on installation without system shutdown
Application Scenarios:
- Ultra-pure water delivery monitoring in semiconductor fabs
- Chemical delivery systems for wet processing stations
- Slurry flow measurement in CMP applications
- Semiconductor wet bench process monitoring
