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AMAT 0240-88626
Product Name: Precision Pneumatic Flow Control Valve Assembly
Product Description: A high-precision pneumatic valve designed for the accurate control of gas flow in ultra-high purity (UHP) gas delivery systems. It ensures stable and repeatable flow rates for critical semiconductor processes.
Technical Specifications:
- Valve Type: Bellows-sealed, pneumatically actuated
Detailed content
- Wetted Materials: 316L Stainless Steel (electropolished), PTFE
- Port Size: 1/4 inch VCR face-seal connections
- Operating Pressure: 0 to 100 PSI
- Actuation Pressure: 60 to 90 PSI
- Leak Rate: ≤ 1 x 10⁻⁹ atm-cc/sec He
Functional Features:
- Ultra-High Purity: Cleanroom assembled and packaged to prevent contamination.
- Zero Leakage: Metal-to-metal bellows seal ensures hermetic isolation.
- Fast Response: Quick actuation for precise flow modulation.
- Long Cycle Life: Robust design for millions of maintenance-free operations.
- Corrosion Resistance: Compatible with corrosive specialty gases.
Application: Installed in gas cabinets and process modules for controlling the flow of precursors and carrier gases in ALD and CVD processes.
