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AMAT 0240-71274
Brand & Part Number: Applied Materials (AMAT) 0240-71274
Product Name: MFC/Bypass Manifold Service Kit
Product Description: A comprehensive maintenance kit for pneumatic mass flow controller (MFC) and bypass valve assemblies, containing all seals, fittings, and components required for overhaul and recalibration.
Detailed content
Technical Specifications:
- Kit Contents: PTFE seals, VCR fittings, filter elements, calibration gaskets, and installation hardware
- Wetted Materials: 316L VIM/VAR stainless steel, PTFE, Kalrez®
- Pressure Rating: 3,000 psig
- Temperature Range: -40°C to +120°C
- Compatibility: Veriflow single pneumatic MFC/bypass assemblies
Functional Features:
- All components manufactured to ultra-high purity (UHP) standards
- Complete seal replacement ensures zero leakage and restores performance
- Precisely matched components for direct fit and easy installation
- Compatible with all standard semiconductor process gases
- Extends service life of MFC assemblies and reduces unplanned downtime
Application: Used for preventive maintenance and repair of gas delivery systems in 5500 PVD mainframe and other semiconductor process tools.
