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AMAT 0240-70922
Brand & Part Number: Applied Materials (AMAT) 0240-70922
Product Name: Gas Panel Manifold Block
Product Description: A precision-machined stainless steel manifold block that integrates multiple gas lines, valves, and filters into a compact assembly for process gas distribution.
Detailed content
Technical Specifications:
- Material: 316L VIM/VAR stainless steel
- Surface Finish: Internal electropolish, Ra ≤ 0.2 μm
- Ports: 1/4″ VCR face seal fittings
- Pressure Rating: 3,000 psig
- Leak Rate: < 1 × 10⁻⁹ atm-cc/sec He
Functional Features:
- Ultra-high purity design for zero contamination
- Minimized internal volume for fast purge
- Compact, modular design for easy installation
- Full vacuum and pressure cycle compatibility
- Complies with SEMI F20/F30 standards
Application: Used in ultra-high purity gas distribution panels for CVD, ALD, and diffusion processes.
