Digital guide
You are here:
AMAT 0240-03082
Product Name: Precision Bellows Assembly / Vacuum Feedthrough
Product Description: A flexible, hermetic metal bellows assembly designed for vacuum-compatible linear motion. It transmits mechanical movement into a vacuum chamber while maintaining an airtight seal and isolating internal components.
Technical Specifications:
- Material: 316L stainless steel for ultra-high vacuum (UHV) compatibility.
Detailed content
- Type: Welded edge-welded bellows for maximum flexibility and longevity.
- Stroke Length: Precision-engineered for specific vertical/horizontal travel.
- Flange: Integral vacuum flanges (CF, ISO, or VCR) for leak-tight mounting.
- Leak Rate: Helium leak-tight to <1 x 10⁻⁹ std cc/sec.
Functional Features:
- Provides frictionless, backlash-free motion transfer into the vacuum environment.
- Absorbs thermal expansion and vibration without compromising the seal.
- Corrosion-resistant to all vacuum pump oils and process gases.
- Designed for millions of flex cycles without fatigue or failure.
Application Scenarios:
- Used for wafer lift assemblies, gate valve actuators, and precision positioning stages.
- Deployed in load locks, transfer chambers, and process modules on all major AMAT platforms.
