Digital guide
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AMAT 0227-05442
Product Name: Precision Bellows Assembly (Linear Motion)
Product Description: A multi-ply, flexible metal bellows assembly that provides hermetic vacuum sealing for linear motion components (e.g., lift pins, gate valves). It allows axial movement while maintaining UHV integrity.
Technical Specifications:
- Material: 316L stainless steel (multi-ply convoluted)
Detailed content
- Stroke Length: ±15mm (total 30mm)
- Outer Diameter: 50mm
- Length (compressed): 75mm
- Leak Rate: < 1 x 10⁻⁹ mbar·l/s He
- Cycle Life: > 1,000,000 full-stroke cycles
- Temperature Rating: -40°C to +250°C
Key Features:
- Ultra-low friction for smooth linear motion
- High cycle life for minimal downtime
- Excellent flexibility & fatigue resistance
- Fully bakeable for UHV applications
- Welded end fittings for leak-tight installation
Application Scenarios:
Used in AMAT wafer lift assemblies, slit valves, and loadlock chambers. Provides vacuum sealing for all reciprocating motion components in Centura & Endura platforms.
