Digital guide
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AMAT 0226-45365
- Product Name: Thermocouple Scanner, DPS3100 Series
- Product Description: Multi-channel temperature scanning module for thermocouple signal conditioning and monitoring in semiconductor process equipment.
- Technical Specifications:
- Input Channels: 8 differential thermocouple inputs
Detailed content
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- Supported Types: J, K, T, E, R, S, B thermocouples
- Accuracy: ±0.1°C (with cold junction compensation)
- Sampling Rate: 10 readings per second per channel
- Output: Digital (RS-485) and analog (0-10V DC)
- Operating Temperature: 0°C to +70°C
- Functional Features:
- Simultaneous monitoring of multiple temperature points
- Automatic cold junction compensation for accurate measurements
- Linearization for all supported thermocouple types
- Built-in diagnostics and fault detection
- Isolated inputs to prevent ground loop issues
- Application Scenarios:
- Installed in AMAT DPS3100 etch chambers
- Used for chamber wall and component temperature monitoring
- Applied in thermal process control systems
- Deployed in semiconductor equipment safety interlocks
- Utilized in process qualification and monitoring systems
