Digital guide
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AMAT 0226-31128
- Brand & Part Number: Applied Materials (AMAT) 0226-31128
- Product Name: Optical Fiber Assembly, Process Monitoring
- Product Description: A high-performance optical fiber assembly designed for non-contact process monitoring and temperature measurement in semiconductor vacuum chambers. It transmits optical signals between process chambers and external measurement systems.
Detailed content
- Technical Specifications:
- Fiber Type: High-OH or low-OH silica optical fiber
- Wavelength Range: 400 ~ 1,700 nm (UV-VIS-NIR)
- Numerical Aperture (NA): 0.22 ± 0.02
- Jacket Material: Fluoropolymer (high-temperature resistant)
- Operating Temperature: -40°C to +250°C
- Length: Customized (typically 2 ~ 5 meters)
- Connector Type: SMA 905 or FC/PC
- Functional Features:
- High transmission efficiency for optical monitoring signals
- Excellent thermal stability in high-temperature process environments
- Hermetic vacuum feedthrough compatibility
- Bend-insensitive design maintains signal integrity
- Low background fluorescence for accurate measurements
- Chemical resistance to process gases and vapors
- Applications:
- Optical pyrometry and temperature monitoring in RTP, CVD chambers
- Plasma emission spectroscopy (OES) process monitoring
- Non-contact wafer temperature measurement in AMAT thermal processes
- Vacuum chamber optical signal transmission
