Digital guide
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AMAT 0225-33921
Product Name: Precision Mass Flow Controller (MFC) Assembly
Product Description: A high-precision instrument used to measure and control the volumetric flow rate of process gases with extreme accuracy in semiconductor deposition and etch processes.
Technical Specifications:
- Technology: Thermal mass flow sensing.
Detailed content
- Gas Compatibility: Optimized for specific gases (e.g., Ar, N₂, O₂).
- Flow Range: Standard ranges from 10 sccm to 10 slm.
- Accuracy: ±1% full scale.
- Control Valve: Fast-acting solenoid or piezoelectric valve.
- Output: Analog (0-5V) or Digital (DeviceNet/RS-485).
Functional Features:
- High Precision: Delivers ultra-stable gas flow for process repeatability.
- Fast Response: Rapidly adjusts to set-point changes.
- Digital Communication: Enables remote control, diagnostics, and recipe integration.
- Corrosion Resistance: Wetted parts made of 316L SS or Hastelloy.
Application: Installed in gas boxes for precise gas delivery in CVD, PVD, ALD, and Etch chambers.
