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AMAT 0200-40002
Product Name: Quartz / Ceramic Chamber Liner / Shield
Product Description: A high-purity, cylindrical component lining the interior of a process chamber. It protects the chamber walls from coatings, directs gas flow, and contains the plasma.
Technical Specifications:
- Material: High-purity fused quartz or advanced ceramic (e.g., SiC-coated graphite)
Detailed content
- Form: One-piece cylindrical liner with precision-machined ports and notches.
- Purity: Ultra-low metallic impurity level to prevent wafer contamination.
- Temperature Rating: Withstands continuous high-temperature and plasma exposure.
Functional Features:
- Excellent resistance to plasma erosion and chemical corrosion.
- Non-porous surface prevents particle generation and accumulation.
- Optimized geometry for uniform plasma distribution and gas flow.
- Easy to install and replace, extending chamber maintenance intervals.
Application Scenarios:
- Used in PVD, Etch, and PECVD chambers (e.g., Endura, Centura).
- Acts as a consumable shield to protect the main chamber body.
