Digital guide
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Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic
- Wafer Compatibility: 150mm (6-inch) wafer processes
- Dimensional Accuracy: ±0.001 inches
- Surface Finish: Smooth, lapped surfaces to prevent particle generation
Functional Features:
- High electrical resistivity for electrical isolation
- Excellent thermal shock resistance
- Chemically inert to prevent contamination
- Precision-machined to ensure proper fit and alignment
Application: Used in 150mm semiconductor process tools, primarily in PVD and CVD chambers, as a focus ring, gas distribution insert, or spacer.
