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AMAT 0200-35595
Product Name: Precision Process Ring/Insulator
Product Description: A high-performance ceramic or quartz component used as a ring, shield, or insulator within semiconductor process chambers. It provides electrical isolation, thermal stability, and protection against process byproducts.
Technical Specifications:
- Material: High-purity quartz (fused silica) or advanced technical ceramic.
Detailed content
- Form: Precision-machined annular ring with tight dimensional tolerances.
- Purity: Ultra-high purity (UHP) grade to minimize metallic contamination.
- Dielectric Strength: High electrical insulation properties for RF and high-voltage environments.
Functional Features:
- Excellent thermal shock resistance and thermal stability at extreme temperatures.
- High chemical inertness against corrosive plasma and gases.
- Low dielectric loss for consistent performance in RF environments.
- Machined to exact profiles for optimal gas flow and plasma confinement.
Application Scenarios:
- Used as focus rings, gas distribution rings, or chamber liners in Etch and PVD chambers.
- Provides electrical isolation between powered electrodes and grounded chamber components.
