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AMAT 0200-35428
- Brand & Part Number: Applied Materials (AMAT) 0200-35428
- Product Name: Precision Ceramic Isolator Ring
- Product Description: A high-purity alumina ceramic isolator ring for electrical insulation in high-voltage semiconductor process components. It provides superior dielectric strength, thermal stability, and plasma resistance.
- Technical Specifications:
- Material: 99.7% high-purity alumina (Al₂O₃)
Detailed content
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- Dielectric Strength: ≥ 18 kV/mm
- Volume Resistivity: ≥ 10¹⁵ Ω·cm
- Maximum Operating Temperature: 1,450°C
- Compressive Strength: ≥ 2,500 MPa
- Surface Finish: Polished to Ra ≤ 0.4 μm
- Tolerance: ± 0.03 mm for critical dimensions
- Functional Features:
- Superior dielectric insulation for high-voltage components
- Excellent resistance to plasma and chemical corrosion
- High thermal stability in extreme process temperatures
- Low dielectric loss for high-frequency applications
- Non-porous structure prevents outgassing
- Precision machining ensures perfect fit and alignment
- Applications:
- Electrical isolation for electrodes and ESC assemblies
- High-voltage insulation in PVD, CVD, and etch chambers
- AMAT Endura and Centura platform high-voltage components
