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AMAT 0200-35256
Product Name: 200mm Chamber Liner / Shield Assembly
Product Description: A one-piece, cylindrical protective liner for 200mm process chambers. It lines the interior walls to protect them from corrosive plasmas and thin-film coatings, while optimizing gas flow and plasma confinement.
Technical Specifications:
- Material: High-purity aluminum alloy with a hard anodized or plasma-sprayed coating.
Detailed content
- Form: Seamless, one-piece cylindrical construction.
- Features: Precision-machined gas ports, mounting notches, and alignment slots.
- Purity: Ultra-low metallic impurity content to prevent cross-contamination.
- Weight: Lightweight design for easy installation and replacement.
Functional Features:
- Acts as a consumable barrier, protecting the expensive chamber body from erosion.
- Optimizes internal gas flow dynamics for improved process uniformity.
- Contains plasma within the process region, enhancing energy efficiency.
- Smooth surface minimizes particle generation and facilitates easy cleaning.
Application Scenarios:
- Used in 200mm PECVD, LPCVD, and Etch chambers (e.g., Centura DxZ, WxZ).
- Serves as a primary shield in processes involving high plasma density.
