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AMAT 0200-35086

Product Name: Poly Overlap Quartz Pre-Heat Ring

Product Description: A high-purity quartz ring that pre-heats the wafer edge prior to processing, ensuring uniform temperature distribution across the wafer.

Technical Specifications:

  • Material: Fused quartz (QTZ)
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Detailed content

  • Diameter: 200mm/300mm wafer compatible (294.6mm OD)
  • Profile: Precision-machined overlapping design
  • Flatness: ≤ 10μm
  • Surface: Double-side polished

    Functional Features:

  • Edge Pre-Heating: Eliminates thermal gradients at wafer perimeter
  • Uniform Deposition: Ensures consistent film thickness from center to edge
  • Non-Contact: Radiant heating prevents physical wafer contact
  • Purity: Ultra-low trace metal content (<1ppb)

    Application: Used in poly-silicon and amorphous silicon deposition processes.

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