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AMAT 0200-24271
Product Name: Quartz Chamber Shield Assembly
Product Description: A large, formed quartz shield that protects the upper chamber and feedthroughs from deposition byproducts in high-volume CVD processes.
Technical Specifications:
- Material: High-purity, low-metal fused quartz
Detailed content
- Form: Dome-shaped or cylindrical shield with precision cutouts
- Wall Thickness: 3–5mm for structural rigidity
- Transmission: High UV/IR transparency for process monitoring
- Thermal Expansion: Ultra-low coefficient for stability
Functional Features:
- Contamination Barrier: Captures deposited films, protecting chamber components
- Optical Clarity: Allows unobstructed view for end-point detection systems
- Easy Replacement: Designed for quick removal during preventive maintenance
- Chemical Durability: Resists cleaning via HF and other wet chemistries
Application: Used in high-rate PECVD chambers (Producer, Centura) for TEOS, SiN, and low-k dielectric films.
