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AMAT 0200-20064

  • Product Name: Ceramic Isolator Spacer
  • Product Description: A high-purity ceramic component providing electrical isolation and physical spacing between charged electrodes in plasma process chambers.
  • Technical Specifications:
    • Material: 99.6% High-purity Alumina (Al₂O₃)
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Detailed content

    • Dimensions: 25mm OD x 12mm ID x 15mm Height
    • Dielectric Strength: >20 kV/mm
    • Max Operating Temperature: 1700°C
    • Compressive Strength: >2000 MPa
    • Surface Finish: Ra < 0.8 μm
  • Functional Features:
    • Excellent electrical insulation in high-voltage RF environments
    • Non-contaminating, low-outgassing properties for UHV
    • High resistance to plasma erosion and chemical corrosion
    • Precision machining for tight dimensional tolerances
    • High thermal stability under extreme thermal cycling
    • Mechanical robustness to support electrode assemblies
  • Applications: Electrical isolation for cathode/anode assemblies in PVD & Etch chambers; standoff insulators for RF coils and electrode mounts in 200mm/300mm platforms.

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