Digital guide
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Technical Specifications:
- Material: 5083 aluminum alloy
- Sealing: Viton O-ring groove
- Viewport: Fused silica window (optional)
- Vacuum Rating: UHV (10⁻⁹ Torr)
- Dimensions: 300 x 300 mm
Functional Features:
- Vacuum-tight seal under thermal cycling
- Integrated safety interlock
- Smooth, easy-to-clean interior
- Hinged for quick access
Application: Serves as the main access door for sputter preclean and degas chambers.
