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AMAT 0200-17464
Product Name: Quartz Isolation Ring Assembly
Product Description: High-purity quartz isolation ring designed for electrical insulation and thermal stability in semiconductor process chambers.
Technical Specifications:
- Material: High-purity synthetic fused silica (99.998% SiO₂)
Detailed content
- Dimensions: 200mm outer diameter, 160mm inner diameter, 10mm thickness
- Temperature Resistance: Up to 1100°C
- Dielectric Strength: ≥20kV/mm
- Surface Finish: Fire-polished internal and external surfaces
Functional Features:
- Provides superior electrical isolation between chamber components
- Excellent thermal shock resistance prevents cracking during rapid thermal cycling
- Ultra-high purity minimizes contamination in critical semiconductor processes
- Low particle generation for clean process environments
- Resistant to chemical corrosion from process gases and plasma
Application Scenarios:
- Electrical isolation in PECVD and etch chambers
- High-temperature semiconductor deposition processes
- Insulation for RF coil assemblies in plasma systems
- Centura and DPS series process chamber components
