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AMAT 0200-10540
- Brand & Part Number: Applied Materials (AMAT) 0200-10540
- Product Name: High-Purity Alumina Ceramic Isolator
- Product Description: A precision-machined high-purity alumina ceramic isolator providing electrical insulation in high-voltage semiconductor chamber components. It offers exceptional dielectric strength, thermal stability, and plasma resistance.
Detailed content
- Technical Specifications:
- Material: 99.7% high-purity alumina (Al₂O₃)
- Dimensions: 20mm OD × 10mm ID × 15mm length
- Dielectric Strength: ≥ 18 kV/mm
- Volume Resistivity: ≥ 10¹⁵ Ω·cm
- Maximum Operating Temperature: 1,450°C
- Compressive Strength: ≥ 2,500 MPa
- Surface Finish: Ground to Ra ≤ 0.4 μm
- Functional Features:
- Superior electrical insulation for high-voltage DC/RF components
- Excellent resistance to plasma corrosion and chemical attack
- High mechanical strength withstands compressive loading
- Ultra-low outgassing in high vacuum conditions
- Dimensional stability across extreme temperature ranges
- Non-contaminating composition preserves wafer yield
- Applications:
- Electrical isolation in electrostatic chuck (ESC) assemblies
- Spacing and insulation for electrodes in PVD and etch chambers
- High-voltage components in AMAT Centura and Endura platforms
- Vacuum components requiring dielectric isolation
