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AMAT 0200-10203
Product Name: 200mm Quartz Insulator Ring / ESC Isolation Spacer
Product Description: A high-purity fused quartz ring that provides critical electrical isolation between the electrostatic chuck (ESC) and the grounded chamber body. It maintains precise spacing and dielectric separation in high-voltage process environments.
Technical Specifications:
- Material: High-purity, synthetic fused silica (quartz).
Detailed content
- Dimensions: Precision-machined to 200mm chamber specifications with tight inner/outer diameter tolerances.
- Dielectric Strength: Minimum 20kV/mm to withstand high RF and ESC bias voltages.
- Temperature Rating: Continuous operation up to 1000°C.
- Surface Finish: Fire-polished or super-ground to minimize particle adhesion.
Functional Features:
- Provides complete electrical isolation to prevent ground loops and ensure stable ESC operation.
- Near-zero thermal expansion for exceptional dimensional stability during extreme thermal cycling.
- High transmittance of infrared radiation for efficient thermal processing.
- Inert to all semiconductor process chemistries, preventing contamination.
Application Scenarios:
- Integrated into electrostatic chuck assemblies in 200mm Etch and PVD chambers.
- Used in high-power RF and plasma processes requiring robust dielectric isolation.
