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AMAT 0200-10164
Product Name: Ceramic Pumping Insert Shield
Product Description: A high-purity ceramic (Al₂O₃) component designed to protect vacuum pump ports and optimize gas flow dynamics within the process chamber.
Technical Specifications:
- Material: 99.6% High-purity Alumina (Al₂O₃).
Detailed content
- Density: ≥ 3.95 g/cm³.
- Dielectric Strength: > 15 kV/mm.
- Max Working Temperature: 1700°C.
- Surface Finish: Ra < 0.8 µm.
Functional Features:
- Excellent chemical resistance to plasma etchants (e.g., fluorine, chlorine).
- Low particle generation to maintain wafer cleanliness.
- High thermal shock resistance.
- Precision-machined to ensure uniform gas conductance.
Application Scenarios: Installed in DXZ, SIN, and etch chambers to shield pumps from process byproducts and improve pumping efficiency.
