Digital guide
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AMAT 0200-09764
Product Name: Electrostatic Chuck (ESC) Insulator Ring
Product Description: A high-performance dielectric insulator ring for electrostatic chuck assemblies, providing electrical isolation and thermal stability in wafer clamping systems.
Technical Specifications:
- Material: Boron nitride (BN) reinforced ceramic composite
Detailed content
- Dielectric Strength: >15kV/mm
- Thermal Conductivity: 80 W/m-K
- Max Operating Temp: 800°C
- Dimensional Tolerance: ±0.01mm
Functional Features:
- Provides superior electrical isolation for high-voltage chucking electrodes.
- Optimized thermal conductivity ensures uniform wafer temperature distribution.
- Excellent plasma resistance in oxidizing and reducing environments.
- Low outgassing properties maintain UHV chamber conditions.
Application Scenarios: Insulation for electrostatic chucks in PVD, CVD, and etching process chambers requiring precise wafer clamping.
