Digital guide
You are here:
Detailed content
- Design: Multi-orifice precision nozzle with internal flow channels
- Tolerances: Orifice diameters held to ±0.01mm
- Surface Finish: Electropolished internal bore
- Mounting: Flanged for vacuum-tight installation
Functional Features:
- Uniform Gas Flow: Ensures laminar flow and consistent gas distribution
- Non-Wetting Surface: Prevents process precursor condensation
- High Purity: Zero metallic contamination critical for advanced processes
- Corrosion Resistance: Immune to corrosive halogenated process gases
Application: Used in ultra-high purity CVD and ALD processes for materials like HfO₂, ZrO₂, and Al₂O₃.
