Digital guide
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AMAT 0200-09442
Product Name: Sapphire Viewport Window / Optical Component
Product Description: A high-purity, single-crystal sapphire component designed for optical access and process monitoring in high-vacuum, high-temperature semiconductor chambers. Offers exceptional optical transparency and durability.
Technical Specifications:
- Material: Optical-grade, single-crystal Sapphire (Al₂O₃)
Detailed content
- Diameter/Size: 50mm (2 inches) diameter, 5mm thickness
- Surface Quality: 40-20 scratch-dig (S/D)
- Parallelism: ≤ 2 arc minutes
- Transmittance: >85% in UV to Near-IR (200-5000 nm)
- Maximum Operating Temperature: 1800°C
Functional Features:
- Extreme hardness (second only to diamond) resists scratching and plasma erosion
- Excellent chemical inertness to all process gases and plasmas
- High thermal shock resistance prevents thermal cracking
- Provides clear optical access for pyrometry, interferometry, and visual inspection
- Hermetically sealable to metal flanges via brazing or compression
Application Scenarios: Used as viewports, windows, or optical lenses in PVD, CVD, and Etch chambers for in-situ process monitoring, temperature measurement, and endpoint detection.
