Digital guide
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AMAT 0200-09305
- Brand & Part Number: Applied Materials (AMAT) 0200-09305
- Product Name: Ceramic Isolation Ring
- Product Description: A precision-machined ceramic isolation ring providing electrical insulation and mechanical spacing between high-voltage components in semiconductor process chambers. It combines exceptional dielectric strength with mechanical stability.
Detailed content
- Technical Specifications:
- Material: 99.7% high-purity alumina (Al₂O₃)
- Dimensions: 150mm OD × 130mm ID × 10mm thickness
- Dielectric Strength: ≥ 18kV/mm
- Compressive Strength: ≥ 2500MPa
- Surface Finish: Lapped to Ra ≤ 0.5μm
- Flatness: ≤ 3μm across entire surface
- Maximum Operating Temperature: 1450°C
- Functional Features:
- Superior electrical insulation for high-voltage DC/RF components
- High mechanical strength withstands compressive loading
- Excellent plasma and chemical corrosion resistance
- Ultra-low outgassing in high vacuum conditions
- Dimensional stability across extreme temperature ranges
- Non-contaminating composition preserves wafer yield
- Applications:
- Electrical isolation in electrostatic chuck (ESC) assemblies
- High-voltage electrode isolation in PVD chambers
- Insulating spacer for AMAT Endura platform components
- Vacuum applications requiring dielectric isolation
