Digital guide
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AMAT 0200-09244
- Product Name: Shaft, Pedestal Lift, Ceramic Coated
- Product Description: Precision linear drive shaft for wafer pedestal elevation systems, featuring advanced ceramic coating for wear resistance in vacuum environments.
- Technical Specifications:
- Base Material: 17-4PH stainless steel (H900 condition)
Detailed content
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- Coating: Titanium nitride (TiN) ceramic, 50μm thickness
- Coating Hardness: 2,500 Vickers
- Diameter: 12.0mm ±0.002mm
- Length: 215.0mm ±0.05mm
- Straightness: ≤0.01mm per 100mm
- Surface Finish: Coated surface Ra ≤ 0.2μm
- Functional Features:
- Exceptional wear resistance for millions of lift cycles
- Low coefficient of friction reduces drive motor load
- Ceramic coating prevents metal particle generation
- High corrosion resistance to process environments
- Precision ground tolerances ensure smooth linear movement
- Application Scenarios:
- Used in AMAT Centura etch and deposition chambers
- Applied in electrostatic chuck (ESC) pedestal lift systems
- Deployed in 200mm and 300mm wafer processing platforms
- Utilized in high-vacuum wafer positioning subsystems
- Suitable for both dielectric and metal process environments
