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AMAT 0200-08347
Product Name: Ceramic Robot Blade Assembly (End Effector)
Product Description: An ultra-lightweight, rigid ceramic blade used for contactless handling of silicon wafers in automated wafer transfer systems.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic composite
Detailed content
- Design: Thin, fork-style single-blade configuration
- Dimensions: Precision-machined for 200mm wafer handling
- Flatness: ≤ 5μm total indicator reading (TIR)
- Weight: 0.31kg
- Coating: Non-slip, non-contaminating surface coating
Functional Features:
- High Strength-to-Weight Ratio: Maintains rigidity at high speeds
- Non-Particle Generation: Smooth, non-porous surface for cleanroom compatibility
- Chemical Resistance: Inert to process gases and cleaning solvents
- Wafer Protection: Low-contact design prevents scratching or breakage
Application: Deployed in AMAT Centura and Endura wafer handling robots for transferring 200mm wafers between process modules.
