Digital guide
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AMAT 0200-06073
- Brand & Part Number: Applied Materials (AMAT) 0200-06073
- Product Name: Ceramic Lift Pin
- Product Description: A single high-purity ceramic lift pin for precision wafer lifting and positioning in semiconductor vacuum chambers. It provides non-contacting wafer support with excellent wear resistance and thermal stability.
Detailed content
- Technical Specifications:
- Material: 99.5% high-purity alumina (Al₂O₃) ceramic
- Diameter: 3.0 mm (precision ground)
- Length: Custom for specific chamber height
- Surface Finish: Polished to Ra ≤ 0.2 μm
- Hardness: ≥ 18 GPa (Vickers)
- Maximum Operating Temperature: 1,200°C
- Compatibility: 200mm/300mm wafer handling systems
- Functional Features:
- Exceptional wear resistance for long service life
- Zero particle generation prevents wafer contamination
- Excellent thermal shock resistance during rapid temperature changes
- Low thermal conductivity minimizes heat loss from wafer
- Non-porous structure eliminates outgassing in vacuum
- Precision dimensional tolerances ensure consistent lifting height
- Applications:
- Wafer lift systems in AMAT Endura, Centura, and Producer platforms
- High-temperature PVD, CVD, and RTP process chambers
- Precision wafer positioning and lifting in vacuum environments
