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AMAT 0200-04366
- Brand & Part Number: Applied Materials (AMAT) 0200-04366
- Product Name: Ceramic Isolator Spacer
- Product Description: A high-purity alumina ceramic spacer providing electrical isolation and precise mechanical spacing in high-voltage semiconductor chamber components. It offers exceptional dielectric strength and plasma resistance in demanding process environments.
Detailed content
- Technical Specifications:
- Material: 99.7% high-purity alumina (Al₂O₃)
- Dimensions: 12mm OD × 6mm ID × 8mm length
- Dielectric Strength: ≥ 18kV/mm
- Volume Resistivity: ≥ 10¹⁵ Ω·cm
- Maximum Operating Temperature: 1450°C
- Compressive Strength: ≥ 2500MPa
- Surface Finish: Ground to Ra ≤ 0.4μm
- Functional Features:
- Superior electrical insulation for high-voltage DC/RF components
- Excellent resistance to plasma corrosion and chemical attack
- High mechanical strength withstands compressive loading
- Ultra-low outgassing in high vacuum conditions
- Dimensional stability across extreme temperature ranges
- Non-contaminating composition preserves wafer yield
- Applications:
- Electrical isolation in electrostatic chuck (ESC) assemblies
- Spacing for electrodes in PVD and etch chambers
- High-voltage components in AMAT Centura and Endura platforms
- Vacuum components requiring dielectric isolation
