Digital guide
You are here:
AMAT 0200-03264
- Product Name: 150mm NCSR Outer Focus Ring
- Product Description: A precision-machined outer focus ring for 150mm wafer electrostatic chucks, used to confine plasma and improve process uniformity at the wafer edge.
- Technical Specifications:
- Material: Silicon (Si) / Highly doped semiconductor grade silicon.
Detailed content
-
- Wafer Size: Compatible with 150mm (6-inch) wafers.
- Dimensions: 210mm OD x 160mm ID x 6mm thickness.
- Edge Profile: Precision-beveled 45° edge.
- Functional Features:
- Improves radial plasma uniformity, reducing edge effects.
- High thermal conductivity to match wafer thermal profile.
- Low contamination, compatible with UHP processes.
- RF transparent for efficient plasma coupling.
- Application Scenarios: Used in 150mm PVD (Endura NCSR) and ion implant chambers for semiconductor device fabrication.
